To provide vacuum tweezers capable of preventing generation of particles.

When a contact part 1a comes into contact with a wafer and any one of two operation parts 3 is operated in a direction of arrow B or C, as an air is started sucking from an intake 1b and pressure in a region formed by a wafer, the contact part 1a and the intake 1b is reduced, the wafer is sucked to the contact part 1a. In this case, as one of two suction parts 1 can be operated by any one of a forefinger, a middle finger and a thumb, it becomes unnecessary to change the direction of the operation part 3 according to a finger operated as usual. Therefore, particles which may generate at that time can be prevented.