Title:
VACUUM ULTRAVIOLET LIGHT SOURCE
Document Type and Number:
Japanese Patent JP2999027
Kind Code:
B2
Abstract:
PURPOSE: To dispense with the axis alignment of an evacuation chamber and improve the workability of vacuum evacuation by forming two differential evacuation chambers into one block, not a double-tube structure, providing a through hole, and providing evacuation ports for differential evacuation from the front and rear ends.
CONSTITUTION: Evacuation chambers 7a, 9a of the second differential evacuation chamber 7a, the second differential evacuation device 8a and the first differential evacuation chamber 9a, the first differential evacuation device 10a are formed with the upper-half recess and the lower-half recess of the same vertical rectangular differential evacuation block 15 with an intermediate bulkhead. Both recesses are opened to a longitudinal center through hole 18 penetrated in the bulkhead via communicating holes 20, 21. The light source of a discharge chamber is introduced into a main vacuum container without making the axis alignment between the first and second differential evacuation chambers 9a, 7a, thus the assembling workability and handling easiness are improved.
Inventors:
Hitoshi Sakamoto
Application Number:
JP23098891A
Publication Date:
January 17, 2000
Filing Date:
August 19, 1991
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
G02B6/00; H01J61/68; H05H1/24; (IPC1-7): H01J61/68
Attorney, Agent or Firm:
Yoshihiko Iinuma