Title:
自動遅延ベント用真空バルブ及びこれを用いた真空装置の自動遅延ベント機構
Document Type and Number:
Japanese Patent JP4131754
Kind Code:
B2
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Inventors:
Fumiaki Hoshino
Application Number:
JP28106997A
Publication Date:
August 13, 2008
Filing Date:
September 30, 1997
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
F16K24/04
Domestic Patent References:
| JP1115880U | ||||
| JP62160785U | ||||
| JP2056875U |