Title:
VACUUM VAPOR DEPOSITION APPARATUS AND VACUUM VAPOR DEPOSITION METHOD
Document Type and Number:
Japanese Patent JP2008140669
Kind Code:
A
Abstract:
To improve the utilization efficiency of an organic electroluminescence material, and to reduce the unevenness of a thickness in the center of a base board.
The organic electroluminescence material is vapor-deposited while moving two vapor deposition sources 10 along both ends of the base board W by a movement mechanism 20. The vapor deposition sources 10 are tilted and moved at an angle toward the center of the base board W by an angle change means 23 to prevent the thickness of the center of the base board W from being thinned and to improve the utilization efficiency of the material at ends of the base board W. The vapor deposition sources 10 may be vertically moved by a lifting means 22.
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Inventors:
FUKUDA NAOTO
YOSHIKAWA TOSHIAKI
MASHITA SEIJI
YOSHIKAWA TOSHIAKI
MASHITA SEIJI
Application Number:
JP2006326498A
Publication Date:
June 19, 2008
Filing Date:
December 04, 2006
Export Citation:
Assignee:
CANON KK
International Classes:
H05B33/10; C23C14/24; H01L51/50
Attorney, Agent or Firm:
Yoshiro Sakamoto
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