Title:
バルブ装置と流体制御チップ
Document Type and Number:
Japanese Patent JP4206732
Kind Code:
B2
Inventors:
Taketoshi Masatoshi
Kenichi Nakano
Kenichi Nakano
Application Number:
JP2002337686A
Publication Date:
January 14, 2009
Filing Date:
November 21, 2002
Export Citation:
Assignee:
Panasonic Corporation
International Classes:
G01N35/08; B81B5/00; F15C4/00; F16K31/02
Domestic Patent References:
| JP52089824A | ||||
| JP51083210A | ||||
| JP2001512813A |
Foreign References:
| US3934601 | ||||
| WO2000013795A1 | ||||
| US6003833 | ||||
| US5441597 | ||||
| US6082185 | ||||
| WO2000032972A1 |
Attorney, Agent or Firm:
Fumio Iwahashi
Hiroki Naito
Daisuke Nagano
Hiroki Naito
Daisuke Nagano