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Title:
VALVE MODULE FOR CHEMICAL LIQUID, CHEMICAL LIQUID SUPPLY CIRCUIT, CONNECTING STRUCTURE OF VALVE MODULE FOR CHEMICAL LIQUID AND VALVE BLOCK FOR CHEMICAL LIQUID
Document Type and Number:
Japanese Patent JP2008057579
Kind Code:
A
Abstract:

To provide a low-cost valve module for chemical liquid with which it does not take a significant time to process a block.

The valve module for the chemical liquid has a first block 12 in which an apparatus attaching surface is formed in an upper surface, a chemical liquid supply port 12c formed in a first side surface, a first flow passage protruding part 12a is formed in a second side surface and a second flow passage protruding part 12b formed in a third side surface, a second block 13 in which an apparatus attaching surface is formed in an upper surface, a chemical liquid return port 13b formed in a first side surface, a first flow passage recessed part 13a is formed in a second side surface and a third block 14 wherein an apparatus attaching surface is formed in an upper surface, an output port 14c formed in a first side surface, a second flow passage recessed part 14a is formed in a second side surface.


Inventors:
SHOMURA AKINORI
Application Number:
JP2006232425A
Publication Date:
March 13, 2008
Filing Date:
August 29, 2006
Export Citation:
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Assignee:
CKD CORP
International Classes:
F16K27/00
Domestic Patent References:
JPS63163002A1988-07-06
JPS6215669U1987-01-30
JP2002276837A2002-09-25
Attorney, Agent or Firm:
Patent Business Corporation Cosmos Patent Office