To provide a low-cost, high-density and uniform vapor deposition material, and to provide a low-loss dielectric multilayered filter by using the vapor deposition material.
The vapor deposition material 2 is formed by sintering it to have a shape of the plurally divided dent shape of a hearth 1. In the case that the dent shape of the hearth 1 is ring-like, the vapor deposition material 2 is sintered to have a shape divided in the circumferential direction of the ring and in the case that the shape of the hearth 1 is circular, the vapor deposition material 2 is sintered to have a shape divided concentric and in the circumferential direction. A thin film having reduced light absorption is deposited by evaporating and depositing by using the hearth 1 for vapor deposition filled with the vapor deposition material 2.
ARAI KAZUKI
NOGUCHI YOSHIKIYO
HOSOYA HIDEYUKI
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