Title:
VARIABLE RESISTANCE ELEMENT, METHOD OF MANUFACTURING VARIABLE RESISTANCE ELEMENT, AND SEMICONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP2019121663
Kind Code:
A
Abstract:
To reduce a size of a nonvolatile variable resistance element having an all solid secondary battery structure.SOLUTION: The variable resistance element has a laminated structure of an all solid secondary battery in which a lower electrode, a positive electrode layer, a solid electrolyte layer, a negative electrode layer, and an upper electrode are sequentially laminated above a substrate. Two measurement electrodes in contact with side surfaces of a positive electrode layer or two layers of the positive electrode layer and a solid electrolyte layer are formed in a self-aligned manner on different side surfaces of the laminated structure. In an arrangement of the measurement electrodes, an alignment margin is not required, so that a size of the nonvolatile variable resistance element is reduced.SELECTED DRAWING: Figure 1
Inventors:
SUGII TOSHIHIRO
Application Number:
JP2017254851A
Publication Date:
July 22, 2019
Filing Date:
December 28, 2017
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01L21/8239; H01L27/105; H01L45/00; H01L49/00
Attorney, Agent or Firm:
Takayoshi Kokubun