Title:
VARIABLE THIN FILM CAPACITOR AND RADIO SIGNAL COMPONENT
Document Type and Number:
Japanese Patent JP3898638
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a variable thin film capacitor and a radio frequency component which are small in the change of capacity caused by a radio frequency signal, are large in the change of the capacity caused by a D.C. bias, maintain its component size even when a new constituent element such as a bias line is added, require a less number of thin film layers sequentially deposited, and suppress a characteristic failure or reliability reduction.
SOLUTION: The variable thin film capacitor has first to N-th variable capacitive elements C1 to Cn whose capacities are varied with application voltages and which are connected in series on carrier substrate 1, a bias line 31 on an input terminal side, and a bias line 32 on an output terminal side. The bias lines 31, 32 contain tantalum at least in its part, and have thin film resistances 61 to 66 having resistivities of 1 mΩcm or larger.
Inventors:
Hideharu Kurioka
Application Number:
JP2002377483A
Publication Date:
March 28, 2007
Filing Date:
December 26, 2002
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
H01G7/06; (IPC1-7): H01G7/06
Domestic Patent References:
| JP10209714A | ||||
| JP2002280261A | ||||
| JP2002129383A | ||||
| JP2002329641A | ||||
| JP5031325U |