VIBRATING GYRO

Japanese Patent JP3166889

B2

PURPOSE: To enable attainment of a simple structure, stable vibration and characteristics being excellent also in sensitivity by a method wherein a support plate is constructed of one plate piece and a means for suppressing interference of the vibration is provided between fixed parts of support members.
CONSTITUTION: End parts of the leg parts 11 of support members 10a and 10b are constituted of a metal material or a resin material and fixed on one main surface of a strip-shaped support plate 13 constructed of one plate piece. More concretely, laterally symmetrical holes 15a and 15b are formed by twos respectively in the vicinity of end parts in the longitudinal direction of the support plate 13, and the end parts of the leg parts 11 of the support member 10a are inserted through the holes 15a on one side and fixed by soldering. The end parts of the leg parts 11 of the support member 10b are inserted likewise through the holes 15b on the other side and fixed by soldering. Since the support plate 13 to which the support members 10a and 10b are fixed is constructed of one plate piece, according to this constitution, the dimensions and the shape thereof are large and it is possible to suppress the movement of the support parts 10a and 10b in linkage to the vibration of a vibrator 2 and to obtain stable vibration and characteristics being excellent also in sensitivity.

JP4933509	Lithography equipment and projection assembly
JPH11139104	VIBRATION-CONTROLLED CARRIAGE

Akira Mori
Yukio Sakashita
Takeshi Nakamura

JP31678293A

May 14, 2001

December 16, 1993

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MURATA MANUFACTURING CO.,LTD.

F16F15/02; F16F15/073; G01C19/56; G01C19/5663; (IPC1-7): G01C19/56; G01P9/04

JP313006A
JP5203452A
JP5203451A
JP560563A
JP510763A

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