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Title:
VIBRATING GYROSCOPE
Document Type and Number:
Japanese Patent JP2011107161
Kind Code:
A
Abstract:

To provide a vibrating gyroscope for detecting an accurate and highly-precise angular velocity signal without generating a noise caused by another axis sensitivity to an angular velocity sensing axis.

The vibrating gyroscope is constituted of vibrators 11, 12; a semiconductor component 20 for controlling the vibrators 11, 12; a support substrate 30 for supporting the vibrators 11, 12, and including a circuit component 40 for electrically connecting the vibrators 11, 12 to the semiconductor component 20; and a lid 50 for covering the vibrators 11, 12, the semiconductor component 20 and the circuit component 40 which are provided on the support substrate 30. The vibrating gyroscope is provided with positioning devices 301, 302 for supporting the vibrators 11, 12 in a prescribed sensing axis direction on the support substrate 30.


Inventors:
HATANAKA MASAKAZU
Application Number:
JP2011039772A
Publication Date:
June 02, 2011
Filing Date:
February 25, 2011
Export Citation:
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Assignee:
PANASONIC CORP
International Classes:
G01C19/56; G01C19/5628; G01C19/5783; H01L41/08; H01L41/09; H01L41/187
Domestic Patent References:
JP2006300577A2006-11-02
JP2003133897A2003-05-09
JP2003042768A2003-02-13
JP2002257548A2002-09-11
JPH07294263A1995-11-10
JPH06123629A1994-05-06
JPH03103708A1991-04-30
JP2011133486A2011-07-07
Foreign References:
WO2003046479A12003-06-05
Attorney, Agent or Firm:
Hiroki Naito
Daisuke Nagano
Kentaro Fujii



 
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