To provide a vibration detection method capable of detecting vibration with a simple device constitution, and reducing an influence on a cycle time during a vibration detection time.

This vibration detection method for detecting vibration generated in a measuring object, when performing visual inspection of the measuring object having a pattern repeated formation part where a pattern is formed repeatedly approximately at a constant pitch, has an imaging process S11 for acquiring an inspection image by imaging the pattern repeated formation part, a distance measuring process S12 for measuring a distance between patterns on a plurality of spots in the repeating direction based on a brightness distribution in the repeating direction of the pattern in the inspection image, and a vibration detection process S14 for detecting the vibration generated during imaging based on fluctuation in the repeating direction of the distance between patterns. When the vibration is detected, imaging and vibration detection are performed again in the imaging process S21, the distance measuring process S22 and the vibration detection process S14.