Title:
VIBRATION PIECE, VIBRATION DEVICE, ELECTRONIC APPARATUS AND MOVABLE BODY
Document Type and Number:
Japanese Patent JP2015203688
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a vibration piece having a necessary adjustment width of a resonance frequency and reducing degradation of acquisition efficiency of electric charge or of utilization efficiency of the electric charge in electrodes, and further to provide a vibration device being provided with the vibration piece and having high sensibility and an electronic apparatus and a movable body provided with the vibration piece.SOLUTION: A vibration piece 15 includes: a base portion 25; detecting vibration arms 26a and 26b comprising detection side arm portions 261a and 261b extending therefrom, detection side weight portions 262a and 262b positioned at free end sides of the detection side arm portions 261a and 261b and through-holes 265a and 265b provided at the free end sides of the detection side arm portions 261a and 261b; a first signal electrode 47b and a second signal electrode 47c provided to the detection side arm portions 261a and 261b; a third signal electrode (second electrode) connected to the second signal electrode 47c (first electrode) via the through-hole 265a; and a fourth signal electrode (second electrode) similarly connected to the first signal electrode 47b (first electrode) via the through-hole 265b.
Inventors:
NAKAGAWA HIROSHI
NISHIZAWA RYUTA
YAMAGUCHI KEIICHI
NISHIZAWA RYUTA
YAMAGUCHI KEIICHI
Application Number:
JP2014084924A
Publication Date:
November 16, 2015
Filing Date:
April 16, 2014
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G01C19/5607; H01L41/113; H01L41/311; H03H9/19; H03H9/215
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuo Asahi
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