Title:
PROBE AND PROBE CARD
Document Type and Number:
Japanese Patent JP2015203689
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a probe and a probe card capable of improving inspection efficiency.SOLUTION: A probe 3 comprises a bar-shaped tip end part 8 including a needle tip 7 contacting an inspected body, and a bar-shaped body part 9 coupled to one end of the tip end part 8. The tip end part 8 of the probe 3 has a limitation mark 11 indicating a limitation point of wear of the tip end part 8. The limitation mark 11 is provided as a part having a cross sectional shape different from that of other parts where the limitation mark 11 is not provided, on the tip end part 8 of the probe 3. A probe card is formed of the probe 3, a substrate for supporting the probe, and a fixing member for fixing the probe 3 on the substrate.
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Inventors:
MAKINAE YUKIHIRO
NISHI HIDEO
NISHI HIDEO
Application Number:
JP2014084928A
Publication Date:
November 16, 2015
Filing Date:
April 16, 2014
Export Citation:
Assignee:
MICRONICS JAPAN CO LTD
International Classes:
G01R1/073; G01R31/26; H01L21/66
Domestic Patent References:
| JPH11230989A | 1999-08-27 | |||
| JPH0837211A | 1996-02-06 | |||
| JP2008267971A | 2008-11-06 | |||
| JPH11230989A | 1999-08-27 | |||
| JPH0837211A | 1996-02-06 | |||
| JP2008267971A | 2008-11-06 |
Foreign References:
| US6298312B1 | 2001-10-02 | |||
| US6298312B1 | 2001-10-02 |
Attorney, Agent or Firm:
Atsuko Oaku
Mitsumura Yoshikatsu
Mitsumura Yoshikatsu
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