Title:
VOLTAGE IMPRESSING DEVICE, METHOD AND DEVICE FOR MANUFACTURING ELECTRON SOURCE
Document Type and Number:
Japanese Patent JP2002367506
Kind Code:
A
Abstract:
To eliminate failure due to cracking or damage to a substrate and enhance the durability of a probe and its electrical continuity performance.
A probe unit 621 works as a voltage impressing means connected to a conductor installed on the substrate 10 of an electron source and impressing a voltage on an electrode wiring formed on the substrate 10, wherein the position of a probe 601 provided in the probe unit 621 is controlled relative to the position of the electrode wiring, and further an elongation measuring instrument 605 is installed to measure the elongation with respect to the substrate 10, and the measured elongation by the measuring instrument 605 is fed back and the position of the probe 601 is shifted.
Inventors:
OKI KAZUHIRO
KIMURA AKIHIRO
KAMATA SHIGETO
KIMURA AKIHIRO
KAMATA SHIGETO
Application Number:
JP2001176796A
Publication Date:
December 20, 2002
Filing Date:
June 12, 2001
Export Citation:
Assignee:
CANON KK
International Classes:
H01J9/02; (IPC1-7): H01J9/02
Attorney, Agent or Firm:
Tetsuya Ito
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