Title:
WASHING AND APPARATUS THEREFOR
Document Type and Number:
Japanese Patent JP3495121
Kind Code:
B2
Abstract:
PURPOSE: To shorten a washing treatment time and to enhance washing effect by forming the uniform flow of a washing soln. from above to below in a washing tank and irradiating the article to be washed in the washing tank with ultrasonic waves from the upper part of the washing tank to wash the same.
CONSTITUTION: A rinse washing tank 100 used for the rinse washing after the washing with hydrofluoric acid is constituted by providing a draw-out type tank structure allowing a washing soln. to flow downwardly and equipped with an up-and-down slide type upper lid 101 opened and closed automatically accompanied by the taking-in-and-out of an article to be washed. An ultrasonic vibration element 102 is arranged to the lower part of an upper lid 101 and ultrasonic waves are emitted therefrom to wash the article to be washed in the washing tank 100. At this time, the upper lid 101 is closed to eject N2 gas from a pipe 106 and the surface of the washing soln. is covered with N2 gas to prevent the mixing of the washing soln. with O2 gas in the atmosphere. The ultrasonic vibration element 102 is operated in this state to irradiate the article to be washed with ultrasonic waves to enhance washing effect.
Inventors:
Tadahiro Ohmi
Application Number:
JP90495A
Publication Date:
February 09, 2004
Filing Date:
January 06, 1995
Export Citation:
Assignee:
Tadahiro Ohmi
UCT Co., Ltd.
UCT Co., Ltd.
International Classes:
B08B3/10; B08B3/12; H01L21/304; (IPC1-7): B08B3/12; B08B3/10; H01L21/304
Domestic Patent References:
| JP234923A | ||||
| JP1304088A | ||||
| JP441781U | ||||
| JP652980U | ||||
| JP296726U | ||||
| JP63173389U |
Attorney, Agent or Firm:
Hisao Fukumori