WASHING DEVICE AND WASHING METHOD

Title:

WASHING DEVICE AND WASHING METHOD

Document Type and Number:

Japanese Patent JP2005034782

Kind Code:

A

Abstract:

To provide a washing device of a low cost which can remove not only dust but also liquid, can also prevent re-adhering thereof to an object to be washed and further can wash without necessitating a dust catcher by vacuum or the like.

The washing device is provided with an air feeding means which obliquely blows high pressure air to a face to be washed 2a from an air nozzle 1 arranged near the face to be washed 2a of the object to be washed 2 and a recovering means which is arranged in front of a jet 1a of the air nozzle 1 and which discharges and the recovers the air AR containing at least adherent materials 3 removed from the object to be washed 2 to an exhaust gas introducing route 6 along an air guide wall surface 5a. The recovering means is constituted of an air guide section 5 which is arranged in front of the jet 1a of the air nozzle 1 and an air cover section 7 which constitutes the exhaust gas introducing route 6 for recovering the air AR flowing along the air guide wall surface 5a of the air guide section 5.

Inventors:

WAKAO MITSUNOBU
TERAI MASATAKA
OOSHIMA YUKITOYO

Application Number:

JP2003275868A

Publication Date:

February 10, 2005

Filing Date:

July 17, 2003

Export Citation:

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Assignee:

SONY CORP

International Classes:

B08B5/00; B08B3/02; B08B3/12; B08B5/02; B08B6/00; B08B7/02; B08B7/04; B08B15/04; H01L21/00; H01L21/304; (IPC1-7): B08B5/00; B08B3/02; B08B3/12; B08B5/02; B08B6/00; B08B7/04; H01L21/304

Attorney, Agent or Firm:

Yoshitsuno Kakuda
Hironobu Isoyama

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