Title:
WASHING DEVICE AND WASHING METHOD
Document Type and Number:
Japanese Patent JP2007222753
Kind Code:
A
Abstract:
To provide a washing device and a washing method performing high quality washing of a large substrate, and enhancing the production efficiency.
The washing device 1 comprises first and second washing tubs 2, 3, first and second charging/recovering means 4, 5, a carrying part 6 for connection, and a control part 7. The first charging/recovering means 4, first washing tub 2, carrying part 6 for connection, second washing tub 3, and second charging/recovering means 5 are linearly juxtaposed from the left to right.
COPYRIGHT: (C)2007,JPO&INPIT
Inventors:
HONDA KUNIYUKI
Application Number:
JP2006045773A
Publication Date:
September 06, 2007
Filing Date:
February 22, 2006
Export Citation:
Assignee:
HOYA CORP
International Classes:
B08B3/02; G03F1/68; G03F1/82; H01L21/027
Domestic Patent References:
| JPH07135192A | 1995-05-23 | |||
| JPH1022187A | 1998-01-23 |
Attorney, Agent or Firm:
Kihei Watanabe
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