To provide a washing system which uses persulfuric acid ions, the washing system being capable of efficient and secure washing while improving washing effect by making persulfuric acid ion density sufficiently high.
The washing system is equipped with a washing device (washing tanks 1 and 2, a liquid spray nozzle liquid spray nozzle 2) which washes a washed material by using a persulfuric-acid-ion containing solution 16 as washing liquid, an electrolytic reaction device (electrolytic reaction tanks 20 and 25, and a DC power source 22) which generates persulfuric acid ions from sulfuric acid ions contained in the solution through electrolytic reaction to manufacture the persulfuric-acid-ion containing solution, a circulation line (return pipes 10a and 10b and feed pipes 11a and 11b) which circulates the persulfuric-acid-ion containing solution between the washing device and electrolytic reaction device, and a washing surface inspection device (a light emission and reception part 27 and a controller 28) which inspects a washed surface of the washed material.
NAGAI TATSUO
IKEMIYA NORITO
| JPH06183704A | 1994-07-05 | |||
| JP2003100688A | 2003-04-04 | |||
| JP2003511555A | 2003-03-25 |
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