To reduce the frequency of trouble generation by sucking gas into a water sealed type vacuum pump after collecting and removing dust contained in gas by a cyclone provided with a filter, and meanwhile by recirculating industrial water by a pump after degassing it and collecting and removing contaminant therefrom.
When the gas sucked by a water sealed type vacuum pump and the water used for water seal are cleaned, a pump 1 is started, gas including dust inside of a mixing/kneading part 4 is fed to a cyclone 6 through a piping 5 and dust is collected here. On the other hand, industrial water used in the pump 1 is fed to a separator 13 after being degassed in an exhaust pipe 12 and a part of contaminant contained in the industrial water is separated and deposited here. For the purpose of treatment of the contaminant accumulated on the bottom part of the separator 13, after making it flow into a pot 16 by opening a discharge valve 15, the discharge valve 15 is closed and then a pot discharge valve 17 is opened to recover it in a recovering box 18. On the other hand, the industrial water flowing out of the separator 13 is supplied to the pump 1 by a circulation line pump 25 to be recairculated.
KOBAYASHI NORIMASA
ISHII MASAAKI
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