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Title:
WATER-CONTAINING CUTTING LIQUID FOR SLICING SILICON INGOT
Document Type and Number:
Japanese Patent JP2012092256
Kind Code:
A
Abstract:

To provide a water-containing cutting liquid for slicing a silicon ingot, which maintains excellent lubricity even if the temperature of a cutting portion is high because a coating film is formed by the reaction with silicon in the surface of a silicon wafer, in the cutting process of an ingot of silicon or the like.

The water-containing cutting liquid for slicing a silicon ingot contains, as essential components, a water-miscible solvent (A), a reaction-coating type lubricant (B) that reacts with silicon, and water (W). The content of the reaction-coating type lubricant (B) is preferably 0.01-10 wt.% to the total amount of the water-miscible solvent (A) and water (W) in use, and a silane coupling agent is preferable as the reaction-coating type lubricant (B).


Inventors:
FUKUSHIMA TAKESHI
Application Number:
JP2010241979A
Publication Date:
May 17, 2012
Filing Date:
October 28, 2010
Export Citation:
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Assignee:
SANYO CHEMICAL IND LTD
International Classes:
C10M173/02; B24B27/06; B28D7/02; C10M105/76; C10M129/06; C10M129/08; C10M139/04; H01L21/304; C10N30/06; C10N40/22
Attorney, Agent or Firm:
Hirofumi Hayashi