Title:
WATER-REPELLENT COATING FILM, CONTAMINATION PREVENTING PRODUCT AND PRODUCTION OF WATER-REPELLENT COATING FILM
Document Type and Number:
Japanese Patent JP3938431
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a coating film comprising a SiO2 film having water- repellent property, its producing method and a product having a SiO2 film with water-repellent property as a contamination preventing surface.
SOLUTION: When a SiO2 film is formed by CVD method while CH3 groups and/or C2H5 groups remain, a water-repellent coating film is obtd. The film is preferably formed to ≥10 &angst thickness having ≥90° contact angle with water. A gaseous mixture of oxygen gas and the monomer material containing Si atoms and CH3 or C2H5 groups is introduced by 10 to 1000 pts.wt. of oxygen gas to 100 pts.wt. of the monomer material into a vacuum chamber to form a SiO2 thin film by CVD method, in which CH3 and/or C2H5 groups remain on the substrate.
Inventors:
Koji Ichimura
Application Number:
JP8024998A
Publication Date:
June 27, 2007
Filing Date:
March 12, 1998
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
C23C16/42; (IPC1-7): C23C16/42
Domestic Patent References:
| JP6271337A | ||||
| JP7333404A | ||||
| JP6122776A | ||||
| JP8142252A | ||||
| JP8146358A |
Attorney, Agent or Firm:
Yoshihiko Mitsurai