Title:
WAVELENGTH VARIABLE INTERFERENCE FILTER, METHOD FOR MANUFACTURING WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC EQUIPMENT
Document Type and Number:
Japanese Patent JP2014119685
Kind Code:
A
Abstract:
To provide a wavelength variable interference filter with a reduced size.
A movable substrate 52 of a wavelength variable interference filter comprises: a movable part; and a groove 526 formed outside the movable part as seen in a plan view of the movable substrate 52 in a substrate thickness direction. The groove 526 has a bottom face 526c where a groove depth dimension is uniform and a side face contiguous with the bottom face 526c. The side face is composed of, in a cross-sectional view of the movable substrate 52 cut along the substrate thickness direction, a first curved face part 526A and a second curved face part 526B both in the form of a circular arc.
Inventors:
ARAKAWA KATSUHARU
Application Number:
JP2012276552A
Publication Date:
June 30, 2014
Filing Date:
December 19, 2012
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G02B26/00; B81B7/02; B81C3/00; G02B5/28; G01J3/26
Domestic Patent References:
| JP2012083397A | 2012-04-26 | |||
| JP2010211032A | 2010-09-24 | |||
| JP2005165067A | 2005-06-23 | |||
| JP2011197386A | 2011-10-06 | |||
| JP2007086517A | 2007-04-05 | |||
| JP2012083397A | 2012-04-26 | |||
| JP2010211032A | 2010-09-24 | |||
| JP2005165067A | 2005-06-23 |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Kazuhiko Miyasaka
Kazuaki Watanabe
Kazuhiko Miyasaka
Kazuaki Watanabe