Title:
ワイヤーソー装置および該装置に用いられるワークプレート
Document Type and Number:
Japanese Patent JP5768650
Kind Code:
B2
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Inventors:
Makoto Funayama
Fumiyasu Nimura
Tomoaki Tajiri
Yuki Nakashima
Fumiyasu Nimura
Tomoaki Tajiri
Yuki Nakashima
Application Number:
JP2011230854A
Publication Date:
August 26, 2015
Filing Date:
October 20, 2011
Export Citation:
Assignee:
Sumco inc.
International Classes:
B24B27/06; B24B57/02; B28D5/04; B28D7/04; H01L21/304
Domestic Patent References:
| JP2007273711A | ||||
| JP201058228A |
Foreign References:
| WO2009104222A1 |
Attorney, Agent or Firm:
Kenji Sugimura
Keisuke Kawahara
Keisuke Kawahara