Title:
ワイヤソーおよびワイヤソー用ダクト装置
Document Type and Number:
Japanese Patent JP5881080
Kind Code:
B2
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Inventors:
Profitable
Shigeo Morimoto
Mikio Minishi
Kei Tanizaki
Tomoyuki Kawazu
Yabu Yabu
Shigeo Morimoto
Mikio Minishi
Kei Tanizaki
Tomoyuki Kawazu
Yabu Yabu
Application Number:
JP2012043953A
Publication Date:
March 09, 2016
Filing Date:
February 29, 2012
Export Citation:
Assignee:
KOMATSU LTD.
Komatsu NTC Ltd.
Komatsu NTC Ltd.
International Classes:
B24B27/06; B28D5/04; B28D7/02; H01L21/304
Domestic Patent References:
| JP2008213111A |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation
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