Title:
工作物表面加工方法
Document Type and Number:
Japanese Patent JP4283088
Kind Code:
B2
Inventors:
Hiroshi Eda
Standing wave
Junsei Kamiya
Standing wave
Junsei Kamiya
Application Number:
JP2003371192A
Publication Date:
June 24, 2009
Filing Date:
October 30, 2003
Export Citation:
Assignee:
Hiroshi Eda
Standing wave
TOYOTA JIDOSHA KABUSHIKI KAISHA
Standing wave
TOYOTA JIDOSHA KABUSHIKI KAISHA
International Classes:
B24B7/20; H01L21/304; B24B1/00; B24D3/00; B24D3/28; B24D7/02
Domestic Patent References:
| JP2004106080A | ||||
| JP2004235201A | ||||
| JP2002355763A |
Attorney, Agent or Firm:
Hiroshi Tanaka
Eishiro Higuchi
Harumi Miyamoto
Eishiro Higuchi
Harumi Miyamoto