ワーク搬送装置、光照射装置、ワーク搬送方法及び光照射方法

Title:

ワーク搬送装置、光照射装置、ワーク搬送方法及び光照射方法

Document Type and Number:

Japanese Patent JP6665639

Kind Code:

B2

Abstract:

[Problem] To provide a workpiece transporting device with which it is possible to repeat transportation and stopping with high precision of the stop position, which does not compromise productivity. [Solution] A stage 3 is disposed on a base plate 2 that is disposed on an anti-vibration table 1 with anti-vibration elastic bodies 13, 14 interposed between the base plate 2 and the anti-vibration table 1, and a workpiece W on the stage 3 is transported by a moving mechanism 4 moving the stage 3. In a moving speed sequence for the stage, implemented in a control unit 5, acceleration and deceleration periods are periods with which the first peak of the vibration of the base plate 2 due to the driving reaction torque after the end of the acceleration or deceleration section is less than or equal to half the maximum value in relation to the natural vibration period of the anti-vibration elastic bodies 13, 14.

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Inventors:

Kentaro Nomoto
Noriyasu Tarumi

Application Number:

JP2016073277A

Publication Date:

March 13, 2020

Filing Date:

March 31, 2016

Export Citation:

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