Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
WORKPIECE HOLDING MEMBER
Document Type and Number:
Japanese Patent JP2011156633
Kind Code:
A
Abstract:

To inhibit penetration of moisture such as a polishing liquid from a holding surface of a workpiece holding member for holding a workpiece, and also improve strength to make the member hard to get damaged.

A resin solution is applied on a base material 1 and wet-solidified to form a foaming layer 2. The base material 1 on the rear of the foaming layer 2 is exfoliated. The foaming layer 2 is sandwiched between smooth members 3, and heat and pressure are applied to form dense layers 2a-1a and 2b-1b having reduced voids, in which bubbles or the like are crushed, on front and rear faces 2a-1 and 2b-1 of the foaming layer 2. The dense layers 2a-1a and 2b-1b inhibit penetration of the polishing liquid or the like, and also improve strength to make the member hard to get damaged.


Inventors:
TAMAGAWA TOMOHITO
KAWABATA KATSUMASA
MIZUMOTO HIDENOBU
Application Number:
JP2010021818A
Publication Date:
August 18, 2011
Filing Date:
February 03, 2010
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NITTA HAAS INC
International Classes:
B24B37/30; H01L21/304
Domestic Patent References:
JP2004345023A2004-12-09
JP2008055528A2008-03-13
JPH0741169A1995-02-10
JP2004090119A2004-03-25
JP2004090121A2004-03-25
JP2005153053A2005-06-16
JP2002355754A2002-12-10
JP2005011972A2005-01-13
Attorney, Agent or Firm:
Kazuhide Okada



 
Previous Patent: VACUUM PRESSURE CONTROL DEVICE AND VACUUM PRESSURE CONTROL METHOD

Next Patent: WORKPIECE HOLDING MEMBER