X-RAY INSPECTION DEVICE - ISHIDA SEISAKUSHO

Title:

X-RAY INSPECTION DEVICE

Document Type and Number:

Japanese Patent JP2007322344

Kind Code:

A

Abstract:

To obtain an X-ray inspection device capable of realizing a mass inspection and a shape inspection of an article in the same device.

A mass estimation section 40 estimates the mass of an object 12 to be inspected based on an amount of transmission X-rays detected by an X-ray detector 8. A mass judgment section 41 judges the normality/abnormality of the mass of the object 12 based on data S1 input from the mass estimation section 40. An image creation section 42 creates an X-ray transmission image based on the amount of the transmission X-rays detected by the X-ray detector 8. A shape judgment section 43 judges the normality/abnormality of the shape of the object 12. A failure judgment section 44 judges the object 12 as a defective product when there is at least one abnormal result of respective judgment results by the mass judgment section 41 and by the shape judgment section 43.

More Like This:

JP7004826	Dimension measuring device, dimensional measuring method and semiconductor manufacturing system
WO/2022/158107	PROFILE DETECTION METHOD, PROFILE DETECTION PROGRAM, AND INFORMATION PROCESSING DEVICE
JPS5939790	[Title of the Invention] Pattern inspection method

Inventors:

HIROSE OSAMU
NAKAJIMA MASAKI
TAKAHASHI ATSUSHI

Application Number:

JP2006155536A

Publication Date:

December 13, 2007

Filing Date:

June 05, 2006

Export Citation:

Click for automatic bibliography generation Help

Assignee:

ISHIDA SEISAKUSHO

International Classes:

G01B15/04; G01N23/04; G01N23/08

Domestic Patent References:

JP2003028633A	2003-01-29
JPH10194526A	1998-07-28
JP2002296022A	2002-10-09
JPS6021404A	1985-02-02

Attorney, Agent or Firm:

Kengo Takao

Previous Patent: VEHICULAR INSTRUMENT

Next Patent: DEHUMIDIFICATION SENSING AGENT AND MANUFACTURING METHOD THEREFOR