Title:
３つのビーム経路のための切り換えシステムを備えるＸ線光学アセンブリ、及び関連するＸ線回折装置
Document Type and Number:
Japanese Patent JP6716441
Kind Code:
B2
Abstract:
An X-ray optics assembly for an X-ray diffractometer is provided, comprising a multilayer mirror, in particular a Goebel mirror, and a switching system with which beam paths for an X-ray beam are selectable. The X-ray optics assembly includes a monochromator, in particular a channel-cut crystal, and three beam paths for the X-ray beam are selectable using the switching system. A first beam path in a first position of the switching system leads past the multilayer mirror and leads past the monochromator, a second beam path in a second position of the switching system contains the multilayer mirror and leads past the monochromator, and a third beam path in a third position of the switching system contains the multilayer mirror and contains the monochromator. The invention provides an X-ray optics assembly and an X-ray diffractometer which may be used even more universally for various measurement geometries in a simple manner.
Inventors:
Frank Hans Hoffman
Kaiuwe Mettendorf
Kaiuwe Mettendorf
Application Number:
JP2016241302A
Publication Date:
July 01, 2020
Filing Date:
December 13, 2016
Export Citation:
Assignee:
Bruker AXS GmbH
International Classes:
G01N23/20008; G01N23/207
Domestic Patent References:
| JP2008096180A | ||||
| JP4315099A | ||||
| JP2004117343A | ||||
| JP2002530671A | ||||
| JP9222401A | ||||
| JP2003194744A |
Foreign References:
| US20130287178 | ||||
| CN101403713A | ||||
| US20110135059 |
Attorney, Agent or Firm:
Another role Shigehisa
Satoshi Muramatsu
Satoshi Muramatsu