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Title:
X-RAY TUBE AND X-RAY INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP2012142199
Kind Code:
A
Abstract:

To provide an X-ray tube capable of switching energy without changing the X-ray generating position, and to provide an X-ray inspection device using it.

A target 14 includes a first irradiated part being irradiated with a first characteristic X-ray by irradiating an electron beam 12, and a second irradiated part being irradiated with a second characteristic X-ray different from the first characteristic X-ray by irradiating an electron beam 12. An electron beam source 11 emits an electron beam 12, and is located so that the electron beam 12 thus emitted impinges on a predetermined position. A drive unit 16 displaces the target 14 so that a part of the target 14 irradiated with the electron beam 12 at the predetermined position is switched between the first and second irradiated parts.


Inventors:
UEHARA YASUSHI
Application Number:
JP2010294467A
Publication Date:
July 26, 2012
Filing Date:
December 29, 2010
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
H01J35/08; H01J35/14
Attorney, Agent or Firm:
Fukami patent office



 
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