Title:
X-Y TABLE USING LINEAR MAGNETIC ACTUATOR
Document Type and Number:
Japanese Patent JP3832891
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To accomplish a high-speed operation, improvement of durability, prevention of dusts, downsizing (compactness), based on an X-Y table using a linear magnetic actuator.
SOLUTION: Cords for power supply to a linear magnetic actuator and cords for takeout of signals from each kind of sensors are concentrated at a middle shifting member (X table) 3, and these cords are collected into one as a cord for connection with the outside (controller, etc.). Hereby, the adverse effect by the cords can be minimized.
Inventors:
Takuo Imado
Fujisawa Shoji
Kitade Norimitsu
Fujisawa Shoji
Kitade Norimitsu
Application Number:
JP9940196A
Publication Date:
October 11, 2006
Filing Date:
March 28, 1996
Export Citation:
Assignee:
Nippon Thompson Co., Ltd.
International Classes:
B23Q1/00; H02K41/02; B23Q1/25; B23Q1/62; F16C29/04; H02K5/22; H02K7/08; (IPC1-7): H02K41/02; B23Q1/25; F16C29/04
Domestic Patent References:
| JP8243866A | ||||
| JP59053686U | ||||
| JP7238927A |
Attorney, Agent or Firm:
Onaka Kazumune
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