Title:
ACTUATOR FOR SUBSTRATE MACHINING AND SUBSTRATE MACHINING DEVICE
Document Type and Number:
Japanese Patent JP2017101702
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To enable machining such as a groove to be performed to a substrate by always constant and stable pressing force.SOLUTION: An actuator 4 presses a machining tool, which is held at one end of a tool holder, against a surface of a substrate with pressing force due to air from an air cylinder. The actuator 4 includes a guide member 14 and at least one ball 15. The guide member 14 has an open hole 14a with a circular cross section penetrating thereinside, and a pin part 11b of a pressing member 11 is inserted into the open hole 14a. The ball 15 is movably arranged in the open hole 14a of the guide member 14, and presses the pin part 11b to a substrate side with air from the air cylinder.SELECTED DRAWING: Figure 2
Inventors:
HORII RYOGO
Application Number:
JP2015233146A
Publication Date:
June 08, 2017
Filing Date:
November 30, 2015
Export Citation:
Assignee:
MITSUBOSHI DIAMOND IND CO LTD
International Classes:
F15B15/14; B28D5/00
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation
Previous Patent: Rubber coupling
Next Patent: A removing method of a pipe connecting member using a blockade device and the blockade device
Next Patent: A removing method of a pipe connecting member using a blockade device and the blockade device