Title:
An atmosphere controlling method in a stowage container
Document Type and Number:
Japanese Patent JP6106501
Kind Code:
B2
Inventors:
Katsuhiko Koyama
Yasushi Takeuchi
Shinji Asari
Yasushi Takeuchi
Shinji Asari
Application Number:
JP2013083652A
Publication Date:
April 05, 2017
Filing Date:
April 12, 2013
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/673; B65G49/07
Domestic Patent References:
| JP2004022674A | ||||
| JP2006086308A | ||||
| JP10144766A | ||||
| JP2012054392A | ||||
| JP2005079250A | ||||
| JP2009088437A | ||||
| JP2005353940A | ||||
| JP2006351619A | ||||
| JP2003092345A | ||||
| JP6156622A |
Foreign References:
| US20080298933 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito