Title:
切削装置
Document Type and Number:
Japanese Patent JP7379064
Kind Code:
B2
Abstract:
To accurately detect chipping caused in a kerf.SOLUTION: Elastic waves generated when a cutting blade 43 cuts a work-piece W are detected by an AE sensor 71, and time characteristic data on the elastic wave signals detected by the AE sensor 71 are subjected to Fourier-transformation by analysis means 76 to obtain frequency characteristic data. Two or more frequency bands including the elastic waves generated from the cutting blade 43 are specified, and values of the elastic waves subjected to Fourier-transformation are recorded in a predetermined period of time, in the frequency bands. Using the values recorded in the predetermined period of time, Mahalanobis distances of the values of the elastic waves subjected to the Fourier-transformation during the cutting of the work-piece are determined, and if the distances are over a threshold, determining means 77 determines occurrence of processing defect such as chipping.SELECTED DRAWING: Figure 1
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Inventors:
Takahiko Tsuno
Application Number:
JP2019184693A
Publication Date:
November 14, 2023
Filing Date:
October 07, 2019
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B27/06; B23Q17/09; B24B49/10; G01H17/00; H01L21/301
Domestic Patent References:
| JP2016219756A | ||||
| JP2012192511A | ||||
| JP2018176394A | ||||
| JP2017226027A |