A device for making the plasma which is a high region generate in the direction of an axis from the gas medium by a electron cyclotron resonance (ECR)

Title:

A device for making the plasma which is a high region generate in the direction of an axis from the gas medium by a electron cyclotron resonance (ECR)

Document Type and Number:

Japanese Patent JP6265997

Kind Code:

B2

Abstract:

The device includes at least two coaxial waveguides each formed of a central conductor and of an external conductor to bring microwaves into a treatment chamber. The at least two electromagnetic wave injection guides are combined with a magnetic circuit elongated in one direction. The magnetic circuit surrounding the waveguides by creating a magnetic field capable of achieving an ECR condition close to the waveguides.

Inventors:

Beat Schmidt
Christoph Aeo
Philip Moran-Perrier

Application Number:

JP2015530475A

Publication Date:

January 24, 2018

Filing Date:

September 04, 2013

Export Citation:

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Assignee:

Ash W F

International Classes:

H05H1/46; C23C16/511; H01L21/205; H01L21/3065; H01L21/31

Domestic Patent References:

JP2010525155A
JP2000306901A
JP2010500470A
JP3191068A
JP9186000A
JP62031999A
JP6310494A

Foreign References:

WO2008009558A1
US5666023
US5961773

Attorney, Agent or Firm:

Yasuhiko Murayama
Shinya Mitsuhiro
Tatsuhiko Abe

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