Title:
Strain detection element, pressure sensor, microphone, blood pressure sensor and touch panel
Document Type and Number:
Japanese Patent JP6291370
Kind Code:
B2
Abstract:
A strain detection element is provided above a deformable membrane. Moreover, this strain detection element includes an electrode and a stacked body, the stacked body including: a first magnetic layer whose magnetization direction is variable according to a deformation of the membrane; a second magnetic layer provided facing the first magnetic layer; and an intermediate layer provided between these first magnetic layer and second magnetic layer, and at least part of the first magnetic layer is amorphous, and the electrode includes a metal layer configured from a Cu—Ag alloy.
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Inventors:
Yoshihiko Fuji
Hideaki Fukuzawa
Akio Hori
Kaori Shiori
Hideaki Fukuzawa
Akio Hori
Kaori Shiori
Application Number:
JP2014136936A
Publication Date:
March 14, 2018
Filing Date:
July 02, 2014
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
H01L43/08; G01L1/12; G01L9/16; G06F3/041; H04R15/00
Domestic Patent References:
| JP2012078186A | ||||
| JP2003101099A | ||||
| JP2001325704A | ||||
| JP2001036164A | ||||
| JP2001036165A | ||||
| JP2014074606A |
Attorney, Agent or Firm:
Masahiko Hinataji
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