ELECTRONIC DEVICE, PIEZOELECTRIC DEVICE, LIQUID INJECTION HEAD AND MANUFACTURING METHOD FOR THE SAME

Japanese Patent JP2017042952

A

PROBLEM TO BE SOLVED: To provide an electronic device capable of suppressing breakage at an end of a piezoelectric element in a configuration comprising a lower electrode layer, a piezoelectric layer and an upper electrode layer and having the end of the piezoelectric element defined by an end of the upper electrode layer, and a piezoelectric device, a liquid injection head and a manufacturing method therefor.SOLUTION: A piezoelectric device 14 comprises a piezoelectric element 32 formed with a lower electrode layer 37, a piezoelectric layer 38 and an upper electrode layer 39 in this order. At least one end of the piezoelectric element 32 is defined by an end of the upper electrode layer 39. The piezoelectric layer 38 is extended up to an element outer region 41 closer to an outside than one end of the piezoelectric element 32. The piezoelectric layer 38 in the element outer region 41 is formed thinner than the piezoelectric layer 38 in the piezoelectric element 32. A difference between a thickness of the piezoelectric layer 38 in the element outer region 41 and a thickness of the piezoelectric layer 38 in the piezoelectric element 32 is equal to 50 nm or less.SELECTED DRAWING: Figure 4

ASAOKA ICHIRO
MOROZUMI KOICHI
SHIMADA KATSUTO
KURIKI AKIRA

JP2015165506A

March 02, 2017

August 25, 2015

Click for automatic bibliography generation  

SEIKO EPSON CORP

B41J2/14; B41J2/16

JP2014112646A	2014-06-19
JP2015056636A	2015-03-23
JP2015074174A	2015-04-20
JP2005033775A	2005-02-03
JP2014040102A	2014-03-06

US5790156A

1998-08-04

Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai

Previous Patent: 電磁石架台、電磁石装置及び粒子線治療装置

Next Patent: An electronic devide, a fluid injection head, and a manufacturing method of an electronic devide