An exposure method, an exposure device, and a device manufacturing method

Title:

An exposure method, an exposure device, and a device manufacturing method

Document Type and Number:

Japanese Patent JP6066610

Kind Code:

B2

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Inventors:

Soybean Ikuta Yoshihiro

Application Number:

JP2012170371A

Publication Date:

January 25, 2017

Filing Date:

July 31, 2012

Export Citation:

Assignee:

Canon Inc

International Classes:

G03F7/20; G01B11/00; G01B11/24

Domestic Patent References:

Attorney, Agent or Firm:

Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu

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