Title:
MOLECULAR BEAM CRYSTAL GROWTH APPARATUS
Document Type and Number:
Japanese Patent JPH065511
Kind Code:
A
Abstract:
PURPOSE: To provide a molecular beam crystal growth apparatus in which a thin film crystal having a profile which has abrupt composition and doping can be stably epitaxially grown on a substrate.
CONSTITUTION: A molecular beam crystal growth apparatus has a radical beam source 7 contained in a radical beam source chamber 9 having an openable shutter plate 13 arranged in an irradiating port, and a turbo molecular pump 10 connected to the chamber 9 through a gate valve 11. The chamber 9 is adjusted in its vacuum degree by the pump 10 in a state that the plate 13 is closed.
Inventors:
YAO HIDEKI
Application Number:
JP16564292A
Publication Date:
January 14, 1994
Filing Date:
June 24, 1992
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
C30B23/08; H01L21/203; (IPC1-7): H01L21/203; C30B23/08
Attorney, Agent or Firm:
Fukami Hisaro (2 outside)
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