Title:
PIEZOELECTRIC THIN FILM RESONATOR AND FILTER
Document Type and Number:
Japanese Patent JP2017108288
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To improve properties of a piezoelectric thin film resonator.SOLUTION: The piezoelectric thin film resonator comprises: a substrate 10; a lower electrode 12 and an upper electrode 16 that are provided on the substrate 10; and a piezoelectric film 14 at least held within a resonance region 50 where the upper electrode 16 and the lower electrode 12 are opposite to each other, and including a discontinuous part 26 in which the piezoelectric film 14 is discontinuous in at least a partial region surrounding a central region 54 that is a center of the resonance region 50.SELECTED DRAWING: Figure 1
Inventors:
YOKOYAMA TSUYOSHI
SAKASHITA TAKESHI
TANIGUCHI SHINJI
NISHIHARA TOKIHIRO
SAKASHITA TAKESHI
TANIGUCHI SHINJI
NISHIHARA TOKIHIRO
Application Number:
JP2015240563A
Publication Date:
June 15, 2017
Filing Date:
December 09, 2015
Export Citation:
Assignee:
TAIYO YUDEN KK
International Classes:
H03H9/17; H03H9/54
Domestic Patent References:
| JP2010045437A | 2010-02-25 | |||
| JP2014161001A | 2014-09-04 |
Foreign References:
| WO2007052370A1 | 2007-05-10 | |||
| US20110084779A1 | 2011-04-14 |
Attorney, Agent or Firm:
Shuhei Katayama
Previous Patent: A communication apparatus, a control method, and a control program
Next Patent: A controlling device, a method, and a program
Next Patent: A controlling device, a method, and a program