Title:
GAS NOZZLE
Document Type and Number:
Japanese Patent JP2023008826
Kind Code:
A
Abstract:
To provide a gas nozzle having a burnt surface excellent in particle reduction effect.SOLUTION: A gas nozzle 1 according to the present invention is made of a ceramic sintered body having at least one through hole 2a through which gas flows. The gas nozzle 1 includes a first region A in which both the entire inner surface 2a of a through-hole 2 and the end surface 1A provided with the outlet 2b of the through-hole 2 are fired surfaces, and the inner surface 2a of the through-hole 2 is in the vicinity of the outlet 2b, and a second region B located further back than the first region A, and the average crystal grain size in the first region A is smaller than the average crystal grain size in the second region B.SELECTED DRAWING: Figure 1
Inventors:
KAWAKAMI KANA
SUGIYAMA MANAMI
SUGIYAMA MANAMI
Application Number:
JP2022086969A
Publication Date:
January 19, 2023
Filing Date:
May 27, 2022
Export Citation:
Assignee:
COORSTEK KK
International Classes:
H01L21/3065
Attorney, Agent or Firm:
Shigeru Kinoshita
Yuko Sawada
Yuko Sawada