ハードマスク組成物 - ROBINSON,Alex,P.G.

Title:

ハードマスク組成物

Document Type and Number:

Japanese Patent JP7252244

Kind Code:

B2

Abstract:

Disclosed and claimed herein is a composition for forming a spin-on hard-mask, having a fullerene derivative substituted with an amine and a crosslinking agent. The formulation is drain compatible with other solvents used in the semiconductor industry.

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Inventors:

ROBINSON,Alex,P.G.
Dawson, Guy
BROWN,Alan
LADA,Thomas
ROTH,John,L.
JACKSON,Edward,A.

Application Number:

JP2020544630A

Publication Date:

April 04, 2023

Filing Date:

February 25, 2019

Export Citation:

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Assignee:

ROBINSON,Alex,P.G.
Dawson, Guy

International Classes:

H01L21/312; C01B32/156; C07C13/64; C08K3/04; C08L61/20; C08L63/02; C08L63/04; H01L21/3065

Domestic Patent References:

JP2008164806A
JP2015513786A
JP2009167165A
JP2004533637A

Foreign References:

WO2017205272A1
WO2008126804A1

Attorney, Agent or Firm:

Patent Attorney Corporation Hiroe Associates Patent Office

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