Title:
CHANGEOVER TYPE PROBE HEAD
Document Type and Number:
Japanese Patent JP3205060
Kind Code:
B2
Abstract:
PURPOSE: To accurately reproduce the zero position of a scan pin support body by a method wherein a component member is formed from a plurality of diaphragms and spring rings so positioned in contact vertically with each other and the spring rings are located flat in contact vertically with each other at the zero position of the scan pin support body to simplify the structure of the changeover type probe head.
CONSTITUTION: In a changeover type probe head, a mobile part 2 supporting a scan pin 5 is centered by diaphragms 33 and 34 and plate springs 13a-13c at the rest position while being radially bounced at the stationary part 1. The diaphragm rings 33 and 34 and the plate spring rings 13a-13c are partially deviated about the vertical axis of the scan pin by an angle of 120° each and supported on each other radially with a plane. These component members 13a-13c and 33 and 34 have a remarkably large rigidity within the plane and with the support body of the scan pin 5, a large return force accuracy is obtained. Despite it, there is no possibility of wrong deformation of the diaphragms thereby increasing the degree of bias.
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Inventors:
Peter Ehnelt
Eckhart Ender
Eckhart Ender
Application Number:
JP18337192A
Publication Date:
September 04, 2001
Filing Date:
July 10, 1992
Export Citation:
Assignee:
CARL-ZEISS-STIFTUNG
International Classes:
G01B3/00; G01B7/00; G01B21/00; (IPC1-7): G01B21/00; G01B7/00
Attorney, Agent or Firm:
Toshio Yano (2 outside)