Title:
熱ナノインプリント方法
Document Type and Number:
Japanese Patent JP5554170
Kind Code:
B2
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Inventors:
Yuji Hajima
Yoshihisa Hayashida
Takaya 佳輝
Yoshihisa Hayashida
Takaya 佳輝
Application Number:
JP2010160917A
Publication Date:
July 23, 2014
Filing Date:
July 15, 2010
Export Citation:
Assignee:
Maruzen Petrochemical Co., Ltd.
International Classes:
B29C59/02; H01L21/027
Attorney, Agent or Firm:
Ippei Watanabe
Koji Kikawa
Hiroyuki Sato
Shigeru Koike
Koji Kikawa
Hiroyuki Sato
Shigeru Koike