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Patent Searching and Data


Title:
The heater unit for wafer heating
Document Type and Number:
Japanese Patent JP6060889
Kind Code:
B2
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Inventors:
Kei Kitabayashi
Akira Mikumo
Isao Kimura
Application Number:
JP2013259660A
Publication Date:
January 18, 2017
Filing Date:
December 16, 2013
Export Citation:
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Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01L21/683; H01L21/205
Domestic Patent References:
JP2005286107A
JP2007115736A
JP2007019359A
JP2011009706A
JP2003317904A
JP6244143A
JP5251162A
JP2003107946A
JP2004335151A
JP7122544A
Foreign References:
WO2010061740A1
US20130298385
Attorney, Agent or Firm:
Noriyuki Tsujikawa
Masao Yamamoto



 
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