Title:
保持装置
Document Type and Number:
Japanese Patent JP7319158
Kind Code:
B2
Abstract:
To provide a holding device with improved heat conduction efficiency between a ceramic plate and a base member.SOLUTION: The holding device 1 comprises: a ceramic plate 2; a housing chamber 24 which is composed of a recess formed on the rear face 2b of the ceramic plate 2 and is disposed on the ceiling face 24a of the ceramic plate and the periphery of the ceiling face 24a; a gas jet channel 23 composed of a hole penetrating between the ceiling face and the front surface; a porous material 26 which is stored in the housing chamber and has a ventilation route 26a communicating with the gas jet channel; a base material 3 disposed on the rear face side of the ceramic plate; a gas supply channel 33 which is composed of a hole opening in the front surface 3a of the base material and communicates with the gas jet channel via the porous material; an annular protection material 6 disposed to surround the porous material 26 while being sandwiched by the ceramic plate 2 and the base material 3; and a bonding layer 4 which is disposed on the outer periphery of the protection material and interposed between the ceramic plate and the base member. The holding device is made of a material with higher thermal conductivity than that of the protection material.SELECTED DRAWING: Figure 3
Inventors:
Koji Yamamoto
Application Number:
JP2019179852A
Publication Date:
August 01, 2023
Filing Date:
September 30, 2019
Export Citation:
Assignee:
Nippon Special Ceramics Co., Ltd.
International Classes:
H01L21/683; H01L21/3065; H02N13/00
Domestic Patent References:
| JP2022535508A | ||||
| JP2019068044A | ||||
| JP2018101773A | ||||
| JP2015195346A |
Attorney, Agent or Firm:
Patent Attorney Corporation Akatsuki Joint Patent Office
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