Title:
照明光学系及び露光装置並びにデバイス製造方法
Document Type and Number:
Japanese Patent JP6506599
Kind Code:
B2
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Inventors:
Kimura Kazuki
Arai Manabu
Arai Manabu
Application Number:
JP2015083709A
Publication Date:
April 24, 2019
Filing Date:
April 15, 2015
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; G02B19/00
Domestic Patent References:
JP2005191495A | ||||
JP2005175040A | ||||
JP58038822A | ||||
JP2001244183A |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu