照明光学系、露光装置、およびデバイス製造方法

Title:

照明光学系、露光装置、およびデバイス製造方法

Document Type and Number:

Japanese Patent JP6651124

Kind Code:

B2

Abstract:

PROBLEM TO BE SOLVED: To provide an illumination optical system capable of giving a high illuminance while achieving illuminance uniformity in an illumination area and uniformity of illumination angle characteristics.SOLUTION: The illumination optical system illuminating an illumination target surface includes: a first light-emitting part emitting first illumination light from a first light-emitting surface; a second light-emitting part emitting second illumination light from a second light-emitting surface spaced from the first light-emitting surface; a light-condensing member having a first light-condensing part for condensing the first illumination light from the first light-emitting surface and a second light-condensing part for condensing the second illumination light from the second light-emitting surface; and a relay optical system for overlapping at least a part of the first illumination light passing through the first light condensing part and the second illumination light passing through the second light condensing part, on a conjugate plane that is optically conjugate with the illumination target surface, or on the illumination target surface.SELECTED DRAWING: Figure 2

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Inventors:

Koichiro Komatsu

Application Number:

JP2015067762A

Publication Date:

February 19, 2020

Filing Date:

March 28, 2015

Export Citation:

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