Title:
An imprint method and an imprint device
Document Type and Number:
Japanese Patent JP6123396
Kind Code:
B2
Inventors:
Kimio Ito
Hirokazu Oda
Hirokazu Oda
Application Number:
JP2013054670A
Publication Date:
May 10, 2017
Filing Date:
March 18, 2013
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
H01L21/027; B29C59/02; G11B5/84; G11B7/26; H01T23/00; H05F3/04
Domestic Patent References:
| JP2001042598A | ||||
| JP2006114326A | ||||
| JP2009286085A | ||||
| JP2011124046A | ||||
| JP2013041947A |
Attorney, Agent or Firm:
Masataka Ota
Junzo Yoneda
Junzo Yoneda